Layout adjustments made for model-based OPC create an enormous number of fractured, moveable segments. Calibre MASKOPT aligns excessive jogs in this post-OPC data with no impact on the quality of results with respect to critical dimension (CD) control of the lithography process. Proper alignment of two opposing, misaligned jogs can eliminate one post-fracture rectangle. Over the entire layout, this alignment greatly simplifies post-OPC data, significantly reducing the data volumn, fracture runtime, and mask writing time. The output from MASKOPT can be verified with Calibre OPCverify andCalibre MDPverify.
The left image shows fracturing of OPC data before using MASKOPT, the figure on the right is the simplified fracturing achieved after jog alignment and reduction with MASKOPT.
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